Four Point Probe Equipment
Go to the "non-frames" version.
Scroll down this column to view a wide range of sheet resistance and resistivity measurement equipment.

System Configurations

1  Jandel Wafer Four Point Probing System
Multipositon Wafer Probe combined with RM3000 Test Unit

2  Jandel Alternative Wafer Four Point Probing System
Multipositon Wafer Probe combined with HM21 Hand Held Meter

3  Jandel General Purpose Four Point Probing System
Multi Height Probe combined with RM3000 Test Unit

4  Jandel Alternative General Purpose Four Point Probing System
The Mulit Height Probe can be combined with the HM21 Hand Held Meter if the greater measurement range of the RM3000 is not required.

5  Jandel Multi Purpose Four Point Probing System
Multi Height Microposition Probe combined with RM3000 Test Unit

6  Jandel Universal Probe with RM3000 Test Unit
Jandel Universal Probe Specialty Four Point Probe with RM3000 Test Unit

7  Jandel Portable Four Point Probing System
Hand Applied Probe combined with the HM21 Hand Held Meter

8  Option of RM3000 with Hand Applied Probe
Hand Applied Probe combined with the RM3000 Test Unit

9  Jandel Cylindrical Probe combined with the HM21 Hand Held Meter for general purpose four pont probing applications

10  Jandel Cylindrical Probe combined with the RM3000 Test Unit for general purpose four pont probing applications

11  Jandel Portable Four Point Probing System for measuring potscrap, silicon tops and tails, ingots.

12  SRM Probe with HM21 Hand Held Meter

13  SRM Probe with RM3000 Test Unit

System Accessories

14  Jandel Probe Head Light Shrouds

15

16  Jandel ITO Reference Sample

17  The Jandel Cylindrical Probe Head is the model used on all Jandel four point probing systems

18  Cylindrical Probe brochure [257K PDF file]

19  Application Notes regarding Jandel Four Point Probe Heads[149K PDF file]

SRM-232 Four Point Probes

20  SRM-232 Low Cost Sheet Resistance Meters, available in 4 Ranges

21  SRM Probe Head Information

22  SRM Calibration Fixture Information

Ecopia Hall Effect Measurement Systems

23  Ecopia HMS-3000 Two Temperature Hall Measurement System
23a HMS-3000 Video (2006)

24  Ecopia HMS-5000 Variable Temperature Hall Measurement System
24a HMS-5000 Video (2012)

Signatone Resistivity Wafer Mapping System

25  SignatoneThin Film Resistivity Wafer Mapping System for wafers up to 300mm

4 Point Probe Components

26  RM3000 Test Unit w/PC Software
Combined current source and meter in one unit. Measure from 1 milliohm-per-square up to 5 x 10⁸ ohms-per-square

27  RM3000 Operating Manual with software description [700K PDF file]
PC software is included with the RM3000 Test Unit

28  Resistor Plug for external verification of RM3000 Test Unit

29  HM21 Hand Held Meter
Hand held four point probe souce-meter with optional probe.

30  Software for the HM21 Meter
PC software is INCLUDED with the HM21.

31  Resistor Plug for external verification of HM21 Hand Held Meter

32  Multiposition Wafer Probe
Manually probe 1 to 9 pre-set locations on wafers up to 8" in diameter with 1mm repeatability.

33  Multi-Height 4 Point Probe
Easily adjusts for probing materials of varying dimensions such as large substrates, ingots, wafers, etc..

34  Microposition Probe
Ideal for sample up to 76mm (3") diameter requiring high probe placement accuracy.

35  Multi Height Microposition Probe
Removeable X-Y stage to provide both sample size versatility and high tip placement accuracy

36  Universal Probe
Versatile research unit for wafers and substrates up to 76mm (3") in diameter

37  Hand Applied 4 Point Probe
Manually probe large flat panels, ingots, etc.
37a  High Temperature Hand Applied 4 Point Probe
The HAP is available in two versions for use at elevated temperatures.

38  Using the Hand Applied Probe on small samples

39  Identifying the various parts of the Hand Applied Probe

Probe Heads For All Known Systems

40  Listing of All Jandel Four Point Probe Heads
41  Probes for Prometrix, KLA/Tencor, & CDE
Probe heads for KLA/Tencor-Prometrix and CDE systems. These probes look similar, but are not interchangeable.

42  Prometrix/KLA-Tencor Probe Heads[53K PDF file]

43  CDE (Creative Design Engineering) Probe Heads [128K PFD file]

44  Jandel Cylindrical Probe Head

45  Cylindrical Probe brochure [257K PDF file]

46  Application Notes regarding Jandel Four Point Probe Heads[149K PDF file]

47  Mounting Cylindrical Probe on alternate apparatus [91K PDF file

48  Jandel Four Pin Probe Head

49  Jandel Cartridge with Lead Probe Head

50  Jandel Compact Probe Head

51  Jandel Miniature Cartridge Probe Head

52  Jandel Miniature Cartridge with 6-32 tapped holes Probe Head

Specialty 4 Point Probe Heads

53  High/Low Temperature 4 Pt Probes

54  Vacuum Chamber 4 Pt Probes

55  Unusual FIVE Point Probes

56  Close Needle Spacing Probes

57  Square Array Probes

57A  Vertical Array Probes

Four Point Probe Technical Information

58 Short Application Note on Sheet Resistance, Ohms-Per-Square, and the Calculation of Resistivity or Thickness

59 Basic information regarding how to make four point probe measurements using Jandel resistivity test equipment.

60 Four Point Probe Theory - A helpful article

61 Four Point Probe Equations - A helpful article from the University of Illinois - Urbana/Champaign

62 Understanding volume resistivity measurements and converting between ohms-per-square (sheet resistance) and ohms-cm (volume resistivity)

63 Sample Size Requirements and Correction Factors Some questions and answers from Jandel Engineering Ltd.

64 Haldor Topsoe Technical Documents Regarding Correction Factors Correction Factor for various material shapes and sizes

65 1964 National Bureau of Standards Technical Note 199, "Correction Factor Tables for Four-Point Probe Resistivity Measurements on Thin, Circular Semiconductor Samples"

66 Finite-Size Corrections for 4-Point Probe Measurements, by J. R. Senna, Instituto Nacional de Pesquisas Espaciais (INPE), Brasil

67 Questions and answers re: resistivity & resistance, sheet resistance, volume resistivity, surface resistivity by John Clark of Jandel Engineering

68 Q & A regarding the use of Jandel Resistivity Measurement equipment by Pete Clark of Jandel Engineering

69 Four-Point Probe Theory of Operation from the University of California, Berkeley, EECS web site (PDF file)

70 A table of suggested probe tip specifications for various silicon wafer types.

71 A table of common four point probe tip radii and spacings

72 Osmium alloy tips versus tungsten carbide tips

73 Square array versus linear array four point probe

74 Reversing input current to check the validity of a four point probe measurement

75 Determining the best choice of probe tip specifications (tip spacing, spring loads, material, radii) for a given material.

76 How long does a four point probe head last?

77 Jandel FAQ

Hall Effect Measurement Technical Information

78 Wikipedia article regarding the Hall Effect

79 Wikipedia article regarding the Van der Pauw method

80 NIST web page regarding the theory and implementation of the Hall Effect Measurement technique

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Four-Point-Probes is a division of Bridge Technology.
To request further information or to place an order, please call Bridge Technology at 480-988-2256 or send e-mail to Larry Bridge at: sales@bridgetec.com  
Fax # is 480-452-0172